Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array
Wen WangDepartment of Physics and Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, PR ChinaYong Tao TianDepartment of Physics and Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, PR ChinaKun LiDepartment of Physics and Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, PR ChinaEryang LuInstitute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, PR ChinaDong GongDepartment of Physics and Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, PR ChinaXinjian LiDepartment of Physics and Laboratory of Materials Physics, Zhengzhou University, Zhengzhou 450052, PR China
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