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Quantum-dimensional structures produced by ion implantation

Н. Н. ГерасименкоMoscow Institute of Electronic Technology, Moscow, Zelenograd 124498, RussiaYu. N. ParhomenkoMoscow Institute of Steel and Alloys, Moscow, Leninskii av. 1, RussiaV.Yu. TroitskiyMoscow Institute of Electronic Technology, Moscow, Zelenograd 124498, RussiaА. В. ИржакMoscow Institute of Steel and Alloys, Moscow, Leninskii av. 1, RussiaM.N. PavluchenkoMoscow Institute of Electronic Technology, Moscow, Zelenograd 124498, RussiaK.K. DjamanbalinMoscow Institute of Electronic Technology, Moscow, Zelenograd 124498, RussiaA.S. BelogorohovMoscow Institute of Steel and Alloys, Moscow, Leninskii av. 1, Russia
2003en
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