Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8
Hiroaki MisawaHokkaido UniversityToshiaki KondoJST-CREST and Research Institute for Electronic Science, Hokkaido UniversitySaulius JuodkazisJST-CREST and Research Institute for Electronic Science, Hokkaido UniversityVygantas MizeikisJST-CREST and Research Institute for Electronic Science, Hokkaido UniversityShigeki MatsuoDepartment of Ecosystems Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan
2006en
ABI
Annotatsiya
Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
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