Fabrication of two-dimensional coupled photonic crystal resonator arrays by holographic lithography
Guanquan LiangZhongshan (Sun Yat-sen) University State Key Laboratory of Optoelectronic Materials and Technologies, , Guangzhou 510275, People’s Republic of ChinaWuxing MaoZhongshan (Sun Yat-sen) University State Key Laboratory of Optoelectronic Materials and Technologies, , Guangzhou 510275, People’s Republic of ChinaYichen PuZhongshan (Sun Yat-sen) University State Key Laboratory of Optoelectronic Materials and Technologies, , Guangzhou 510275, People’s Republic of ChinaHang ZouZhongshan (Sun Yat-sen) University State Key Laboratory of Optoelectronic Materials and Technologies, , Guangzhou 510275, People’s Republic of ChinaH. Z. WangZhongshan (Sun Yat-sen) University State Key Laboratory of Optoelectronic Materials and Technologies, , Guangzhou 510275, People’s Republic of ChinaZhuoyu ZengZhongshan (Sun Yat-sen) University Institute of Macromolecule, , Guangzhou 510275, People’s Republic of China
2006en
ABI
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We demonstrate the holographic design and fabrication of two-dimensional coupled photonic crystal resonator arrays, which are composed of hexagonal cavities tiled together in a triangular lattice. Band structure analysis reveals that the inverse structure of the fabricated template supports monopole defect mode in a photonic band gap of TM polarization. Our results show the practical importance of holographic lithography in the fabrication of photonic component arrays.
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