Thermal Conductivity Measurement of Thermally-Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique
Ryo KatoUlvac-Riko Inc., 1-9-19 Hakusan, Yokohama, Midoriku, 226-0006, JapanIchiro HattaFukui University of Technology, 3-6-1 Gakuen, Fukui, 910-0028, Japan
2005en
ABI
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