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Energy distribution of metal and noble gas ions traversing single-crystal copper films

З. А. ИсахановArifov Institute of Electronics, Uzbekistan Academy of Sciences, ul. Khodzhaeva 33, Tashkent, 100125, Uzbekistan
Technical Physicsjournal2012en
ABI

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A comparative investigation of the energy distribution of ions that traversed single-crystal cooper films reveals that the energy loss of channeled and nonchanneled particles depends not only on the mass but also on the radius of bombarding ions. It is established that the energy spectra of transmitted ions are highly sensitive to a change in the composition and structure of the films. From the change in these spectra, one can estimate the degree of disordering in thin films under various applied forces.

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