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Ish: The Mechanism of Silicon Epitaxial Layer Growth from Ion-Molecular Beams

1. Epitaxial growth of silicon assisted by ion implantation

   Tadatsugu Itoh, Tohru Nakamura

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   ABIABI:AkademIndex/openalex/2026.other.647999

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   ABIABI:AkademIndex/openalex/2026.other.647998

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   ABIABI:AkademIndex/openalex/2026.other.648000

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   ABIABI:AkademIndex/openalex/2026.other.648001

5. Sarlavhasiz

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   ABIABI:AkademIndex/openalex/2026.other.648002