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Sputtering and surface scattering at oblique ion incidence onto crystals

Е. С. МашковаInstitute of Nuclear Physics, Moscow State University , 119899, Moscow, B-234, USSRV. A. MolchanovInstitute of Nuclear Physics, Moscow State University , 119899, Moscow, B-234, USSR

1987en

ABI

Annotatsiya

Abstract Recent experimental data on sputtering and surface scattering at oblique ion incidence onto monocrystals are presented. The data are discussed qualitatively in terms of modern concepts.

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Identifikatorlar

DOI: 10.1080/00337578708222912

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