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Iron silicides grown by solid phase epitaxy on a<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:mi>Si</mml:mi><mml:mo>(</mml:mo><mml:mn>111</mml:mn><mml:mo>)</mml:mo></mml:mrow></mml:math>surface: Schematic phase diagram

Keita KataokaGraduate School of Materials Science, Nara Institute of Science and Technology (NAIST), Ikoma, Nara 630-0192, JapanKen HattoriCREST-JST, Kawaguchi, Saitama 332-0012, JapanYutaka MiyatakeHiroshi DaimonCREST-JST, Kawaguchi, Saitama 332-0012, Japan
2006lv
ABI

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We have determined the schematic phase diagram in detail with high reliability for Fe silicides grown by solid phase epitaxy (SPE) on a $\mathrm{Si}(111)7\ifmmode\times\else\texttimes\fi{}7$ surface at wide Fe coverage $(0.2--56\phantom{\rule{0.3em}{0ex}}\mathrm{monolayers})$ and subsequent annealing temperatures from 300 to $800\phantom{\rule{0.2em}{0ex}}\ifmmode^\circ\else\textdegree\fi{}\mathrm{C}$. In the SPE growth, $\ensuremath{\delta}\text{\ensuremath{-}}7\ifmmode\times\else\texttimes\fi{}7$, $1\ifmmode\times\else\texttimes\fi{}1$, $\mathrm{bcc}\text{\ensuremath{-}}\mathrm{Fe}(111)1\ifmmode\times\else\texttimes\fi{}1$, $2\ifmmode\times\else\texttimes\fi{}2$, $c(8\ifmmode\times\else\texttimes\fi{}4)$, $3\mathrm{D}\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}2$ $(\ensuremath{\alpha}\text{\ensuremath{-}}{\mathrm{FeSi}}_{2})$, $\sqrt{3}\ifmmode\times\else\texttimes\fi{}\sqrt{3}\text{\ensuremath{-}}R30\ifmmode^\circ\else\textdegree\fi{}$, $\ensuremath{\beta}\text{\ensuremath{-}}{\mathrm{FeSi}}_{2}$, and fine polycrystalline phases are formed on the $\mathrm{Si}(111)$ surface depending on Fe coverage and annealing temperature. We have characterized the surface periodic structures and morphologies of all the above Fe silicide phases using low-energy electron diffraction and scanning tunneling microscopy. Reflection high-energy electron diffraction also has been used to determine three-dimensional structures. Based on the overall view regarding the formations and changes of Fe silicide phases on a $\mathrm{Si}(111)$ surface, we discuss the growth mechanisms.

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