Maqola

Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb

Masato UeharaAdvanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) 1 , 807-1, Tosu, Saga 841-0052, JapanHokuto ShigemotoDepartment of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University 2 , 6-1, Kasuga-kouen, Kasuga, Fukuoka 816-8580, JapanYuki FujioAdvanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) 1 , 807-1, Tosu, Saga 841-0052, JapanToshimi NagaseAdvanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) 1 , 807-1, Tosu, Saga 841-0052, JapanYasuhiro AidaMurata Manufacturing Co., Ltd. 3 , 1-10-1, Higashikoutari, Nagaokakyo, Kyoto 617–8555, JapanKeiichi UmedaMurata Manufacturing Co., Ltd. 3 , 1-10-1, Higashikoutari, Nagaokakyo, Kyoto 617–8555, JapanMorito AkiyamaAdvanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) 1 , 807-1, Tosu, Saga 841-0052, Japan

2017en

ABI

Annotatsiya

Aluminum nitride (AlN) is one of piezoelectric materials, which are eagerly anticipated for use in microelectromechanical systems (MEMS) applications such as communication resonators, sensors, and energy harvesters. AlN is particularly excellent in generated voltage characteristics for the MEMS rather than oxide piezoelectric materials such as lead zirconium titanate Pb(Zr, Ti)O3. However, it is necessary to improve the piezoelectric properties of AlN in order to advance the performance of the MEMS. We dramatically increased the piezoelectric coefficient d33 of AlN films by simultaneously adding magnesium (Mg) and niobium (Nb). The d33 of Mg39.3Nb25.0Al35.7N is 22 pC/N, which is about four times that of AlN. The d33 is increased by Mg and Nb simultaneous addition, and is not increased by Mg or Nb single addition. Interestingly, the Nb has multiple chemical states, and which are influenced by the Mg concentration.

Hali tarjima qilinmagan

Identifikatorlar

DOI: 10.1063/1.4990533

Iqtiboslar va manbalar

2 ta iqtibos0 ta foydalanilgan manba

Koʻrsatkichlar — AkademScholar