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Eugene Kats
1 works
ECO Light Up Pty. Ltd
Atomic Layer Deposition of Ultra-Thin Oxide Semiconductors: Challenges and Opportunities
Serge Zhuiykov
,
Zhenyin Hai
,
Eugene Kats
+2
Article
Semiconductor materials and devices
Key engineering materials
2017
0 citations
ABI
ABI:AkademIndex/openalex/2017.article.000336