Chen Xue

1 works

North University of China

1. Atomic Layer Deposition of Ultra-Thin Oxide Semiconductors: Challenges and Opportunities

   Serge Zhuiykov, Zhenyin Hai, Eugene Kats +2

   ArticleSemiconductor materials and devicesKey engineering materials20170 citations

   ABIABI:AkademIndex/openalex/2017.article.000336