Е. Н. Воронина

1 works

Faculty of Physics

1. Area-selective Ru ALD by amorphous carbon modification using H plasma: from atomistic modeling to full wafer process integration

   Ivan Zyulkov, Е. Н. Воронина, Mikhail Krishtab +6

   ArticleSemiconductor materials and devicesMaterials Advances20200 citations

   ABIABI:AkademIndex/openalex/2020.article.000426