Fengwen Mu

1 works

Institute of Microelectronics of the Chinese Academy of Sciences

1. Surface Activated Bonding of Glass Using Aluminum Oxide Intermediate Layer for Microchannel Fabrication

   Kai Takeuchi, Fengwen Mu, Yoshiie Matsumoto +2

   ArticleNanofabrication and Lithography TechniquesECS Meeting Abstracts20200 citations

   ABIABI:AkademIndex/openalex/2020.article.003857