G. Kh. Allaerova

1 works

Tashkent State Technical University, 100097, Tashkent, Uzbekistan

1. The Effect of Stepwise Postimplantation Annealing on the Composition and Structure of Silicon Surface Layers Implanted with Alkali Metal Ions

   Б. Е. Умирзаков, З. А. Исаханов, G. Kh. Allaerova +1

   ArticleSemiconductor materials and interfacesTechnical Physics Letters20210 citations

   ABIABI:AkademIndex/openalex/2021.article.004233