Umirzakov B.E.

1 works

Tashkent State Technical University, Tashkent, Uzbekistan

1. Influence of preliminary ion bombardment on the formation of Co and CoSi-=SUB=-2-=/SUB=- nanofilms on Si surface during solid-phase deposition

   Turapov I. Kh., I. R. Bekpulatov, A. Q. Tashatov +1

   ArticleIon-surface interactions and analysisПисьма в журнал технической физики20223 citations

   ABIABI:AkademIndex/openalex/2026.other.402221