T. Kamilov

1 works

Tashkent State Technical University, Tashkent, Republic of Uzbekistan

1. Obtaining manganese silicide films on a silicon substrate by the diffusion method

   N. F. Zikrillayev, M. M. Shoabdurahimova, T. Kamilov +4

   ArticleSemiconductor materials and interfacesPhysical Sciences and Technology20222 citations

   ABIABI:AkademIndex/openalex/2026.other.384841