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Quanzhi 权治 ZHANG 张

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  1. Customized modulation on plasma uniformity by non-uniform magnetic field in capacitively coupled plasma

    Sen 森 WANG 王, Quanzhi 权治 ZHANG 张, Fangfang 方方 MA 马 +2

    ArticlePlasma Diagnostics and ApplicationsPlasma Science and Technology20241 citations
    ABI