Ziheng Liu

1 works

DUT-BSU Joint Institute, Dalian University of Technology 1 , Dalian 116024,

1. Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges

   Yu-Meng Cui, Fang‐Fang Ma, Ziheng Liu +3

   ArticlePlasma Diagnostics and ApplicationsJournal of Vacuum Science & Technology A Vacuum Surfaces and Films20250 citations

   ABIABI:AkademIndex/openalex/2025.article.005077