Journal of Physical Science

1 works

Journal · ISSN 1675-3402

1. Study of The Process of Formation of Heterostructural Nanofilms MexSiy/Si and GaxMe1-xAs/GaAs by Ion Implantation

   Eshboboyev Sardor Nurbobo Ugli, Tashatov Allanazar Karshievich

   ArticleIon-surface interactions and analysisJournal of Physical Science20250 citations

   ABIABI:AkademIndex/openalex/2025.article.005323