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Works cited by this work

5 works

Work: High-temperature high-dose implantation of N+ and Al+ ions in 6H-SiC

  1. Theory of Radiation

    J.C. Gunn

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  2. Computer simulation of the sputtering of polyatomic multilayered materials with consideration of the spatial overlapping of the collision cascades

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    Article19962 citations
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  3. Molecular dynamics calculations of defect energetics in β-SiC

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  4. Formation of Buried Layers of (SiC)<sub>1-x</sub>(AINT)<sub>x</sub> in 6H-SiC Using Ion-Beam Synthesis

    R.A. Yankov, N. Hatzopoulos, W. Fukarek +4

    Article19962 citations
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  5. Untitled

    Other1 citations
    ABI