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Article

Investigation of an ion source intended for beam technologies

L. P. VeresovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, AbkhaziyaO. L. VeresovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, AbkhaziyaP. A. LitvinovSukhumi Physicotechnical Institute, Academy of Science of Abkhaziya, Sukhumi, 384914, Abkhaziya
Technical Physicsjournal2000en
ABI

Abstract

An ion source with a cold cathode is described, which generates ion beams of various gases andsolids of circular cross sections for technological purposes.

Topics

Ion-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesPlasma Diagnostics and Applications

Identifiers

DOI
10.1134/1.1259661

Citations and references

Cited by 00 references
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