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Dynamic-sasamal: simulation software for high-dose ion implantation

Y. MiyagawaNational Institute of Advanced Industrial Science and Technology, Shimo-Shidami, Moriyama-ku, Nagoya, JapanH. NakadateFlyura DjurabekovaApplied Physics Institute, National University of Uzbekistan, Tashkent, UzbekistanS. MiyagawaNational Institute of Advanced Industrial Science and Technology, Shimo-Shidami, Moriyama-ku, Nagoya, Japan
Surface and Coatings Technologyjournal2002en
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Abstract

No abstract available.

Topics

Ion-surface interactions and analysisMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research

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DOI
10.1016/s0257-8972(02)00225-6

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