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Work: Computer simulation of ion implantation with visual observation of the implantation profiles

  1. THE STOPPING AND RANGE OF IONS IN SOLIDS

    J. F. Ziegler

    Chapter198411 citations
    ABI
  2. Computer studies of the reflection of light ions from solids

    O.S. Oen, Mark T. Robinson

    Article19766 citations
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  3. Computer simulation of two-component target sputtering

    W. Eckstein, J.P. Biersack

    Article19854 citations
    ABI
  4. Light ion sputtering of low Z materials in the temperature range 20–1100°C

    J. Bohdansky, J. Roth

    Article19842 citations
    ABI
  5. Untitled

    Other1 citations
    ABI
  6. Untitled

    Other1 citations
    ABI