Diffusion of ytterbium in silicon
D. É. NazyrovUlugbek National University of Uzbekistan, Tashkent, 700174, Uzbekistan
ABI
Abstract
Diffusion of ytterbium in silicon is studied by the direct method of radioactive isotopes in the temperature range of 1100–1250°C. Diffusion coefficients of ytterbium impurity in silicon are determined.
Topics
Identifiers
Citations and references
Cited by 02 references
Metrics — AkademScholar · Coming soon