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Diffusion of ytterbium in silicon

D. É. NazyrovUlugbek National University of Uzbekistan, Tashkent, 700174, Uzbekistan
Semiconductorsjournal2003en
ABI

Abstract

Diffusion of ytterbium in silicon is studied by the direct method of radioactive isotopes in the temperature range of 1100–1250°C. Diffusion coefficients of ytterbium impurity in silicon are determined.

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