Computer simulation of ion implantation at grazing ion-surface interactions
A.A. DzhurakhalovF. F. UmarovInstitute of Applied Physics, National University of Uzbekistan, Tashkent, Uzbekistan
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)conference2003en
ABI
Abstract
No abstract available.
Topics
Identifiers
Citations and references
Cited by 05 references
Metrics — AkademScholar · Coming soon