Article

Low-field ion microscopy

V. A. KsenofontovInstitute of Solid State Physics, Material Science and Technologies, National Research Center, Kharkov Physicotechnical Institute, Kharkov, 61108, UkraineE. V. SadanovInstitute of Solid State Physics, Material Science and Technologies, National Research Center, Kharkov Physicotechnical Institute, Kharkov, 61108, UkraineO. A. VelikodnayaInstitute of Solid State Physics, Material Science and Technologies, National Research Center, Kharkov Physicotechnical Institute, Kharkov, 61108, Ukraine

Technical Physicsjournal2009en

ABI

Abstract

Experimental data on field ion emission under high partial pressures of water vapor at room temperature are reported. A method for obtaining low-field ion images in the presence of water vapor is proposed and the potentialities, limitations, and prospects of using images in microscopy are considered.

Topics

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Advanced Electron Microscopy Techniques and Applications

Identifiers

DOI: 10.1134/s1063784209040215

Citations and references

Cited by 08 references

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