PROCESS OF FORMATION OF SPHEROIDAL GOLD PARTICLES AND OF NANOPHASES IN AlN-TiB2-TiSi2 COATINGS AFTER ANNEALING WITH SUBSEQUENT IMPLANTATION
Artem DemianenkoSumy State University, Sumy, UkraineKateryna SmyrnovaSumy State University, Sumy, UkraineБ. ЖоллыбековKaraKalpak State University, KaraKalpak, UzbekistanА. И. КупчишинKharkiv Polytechnic University, Kharkiv, UkraineYoshihiko TakedaNational Institute for Material Science, JapanH. AmekuraNational Institute for Material Science, JapanH. KomstaInstitute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Lublin, PolandMarek OpielakInstitute of Transport, Combustion Engines and Ecology, Lublin University of Technology, 36, Nadbystrzycka Str., 20-618 Lublin, PolandKonrad KierczyńskiDepartment of Electrical Devices and High Voltage Technology, Lublin University of Technology, Lublin, Poland
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processesjournal2015en
ABI
Abstract
This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing at 900°C and 1300°C on the structure and characteristics of AlN−TiB2−TiSi2 coatings prepared by magnetron sputtering. Using a scanning electron microscope (SEM) with microanalysis (EDS), X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), the crystal structure, surface topography, and the microstructure were characterized.
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