Article

Synergetics of surface sputtering by polyatomic ions

Б. Л. ОксенгендлерInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100125, UzbekistanС. Е. МаксимовInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100125, UzbekistanВ.Н. НикифоровMoscow State University, Moscow, 119991, RussiaN.Yu. TuraevInstitute of Ion-Plasma and Laser Technologies, Academy of Sciences of the Republic of Uzbekistan, Tashkent, 100125, Uzbekistan

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniquesjournal2017en

ABI

Abstract

The phenomenon of the sputtering of solids under bombardment with molecular ions is considered within the framework of synergetics. The complete sputtering process is divided into three stages with the help of the concept of three successive regimes: the implementation of a dynamic system, the appearance of a statistical system, and the achievement of a completely statistical system. The manifestation of the basic mechanisms is revealed: elastic cascades and mass transfer under the action of shock waves.

Topics

Ion-surface interactions and analysis Force Microscopy Techniques and Applications High-Velocity Impact and Material Behavior

Identifiers

DOI: 10.1134/s1027451017050329

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