Influence of oxygen ion implantation on composition and structure of free nanofilm Si/Cu system
З. А. ИсахановМ. К. РузибаеваSh.I. KhamrokulovR. M. ErkulovR. KurbonovS.B. OromiddinovInst. Ionno-Plazmennykh i Lazernykh Tekhnologij AN RUz im. U.A. Arifova, Tashkent (Uzbekistan)
2019en
ABI
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