Formation of Barium Silicide Coatings by Vacuum Thermal Evaporation Methods
Bakhrom IgаmоvAcademy of Sciences of the Republic of Uzbekistan,Scientific and Technical Center With a Design Bureau and Pilot Production,Tashkent,UzbekistanAleksey KamardinAcademy of Sciences of the Republic of Uzbekistan,Scientific and Technical Center With a Design Bureau and Pilot Production,Tashkent,UzbekistanI. R. BekpulatovKarshi State University,Karshi,UzbekistanMurodulla NormuradovKarshi State University,Karshi,UzbekistanValentina ZhurikhinaPolytechnic University,Peter The Great St. Petersburg,Saint Petersburg,Russian FederationDilshod NormuradovKarshi State University,Karshi,Uzbekistan
2024en
ABI
Abstract
Options for the formation of thin films of BaSi silicide are the method of vacuum-thermal evaporation of materials, in particular thermal evaporation from a directly heated boat and from a crucible with electronic heating. It was found that Si and other coating components evaporate relatively easily from a graphite crucible. Research has determined the possibility of obtaining BaSi coatings; their composition and structure have been studied, as well as the possibility of protecting it from atmospheric influences with a thin Cr coating.
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