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Works citing this work
1 works
Prospects for the development of optical systems for nanolithography
А. Б. Бельский
,
M. A. Gan
,
I. A. Mironov
+1
Article
Advancements in Photolithography Techniques
Journal of Optical Technology
2009
0 citations
ABI
ABI:AkademIndex/openalex/2009.article.000086