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Work: Sputtering of silicon by multiply charged ions
The emission of atomic and molecular ions under single and multiple-charged rare gas ion bombardment of LiF, KCl, SiC
Б.Г. Атабаев, Sh.S. Radjabov, M.Kh. Akhmadzhanova
ArticleIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19951 citationsABI