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Work: Neutral copper cluster sputtering yields: Ne+ Ar+ and Xe+ bombardment
Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments
S.F. Belykh, V. I. Matveev, I. V. Veryovkin +2
ArticleIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19992 citationsABI