Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions
Sh.Dj. AkhunovArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanС. Н. МорозовArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, UzbekistanУ. Х. РасулевArifov Institute of Electronics, Akademgorodok, 700125 Tashkent, Uzbekistan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2003en
ABI
Abstract
No abstract available.