Non-linear effects in Ta sputtering by Au− ions
С. Н. МорозовUzbek Academy of Sciences, Arifov Institute of Electronics, Akademgorodok, F.Khojaeva 33, 700125 Tashkent, UzbekistanУ. Х. РасулевUzbek Academy of Sciences, Arifov Institute of Electronics, Akademgorodok, F.Khojaeva 33, 700125 Tashkent, Uzbekistan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2003en
ABI
Abstract
No abstract available.