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Work: Secondary Ion Mass Spectrometry
Comparative study of kinetic energy spectra and mass distributions of Ta+ ions sputtered from tantalum by atomic and molecular ion bombardment
S.F. Belykh, У. Х. Расулев, A.V. Samartsev +1
ArticleIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19988 citationsABI