Skip to main content
AkademIndex

Products

For developers

AkademBaseOpen API for the ecosystem
← Back to work

Works citing this work

1 works

  1. Structural characterization and electro-physical properties for SiOC(–H) low-k dielectric films

    A. S. Zakirov, P. K. Khabibullaev, Chi Kyu Choi

    ArticleCopper Interconnects and ReliabilityPhysica B Condensed Matter20090 citations
    ABI