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Research of Surface and Near – Surface Region Diffusion Doped Silicon by Manganese

Makhmudhodzha IsaevTashkent State Technical University named after Islam Karimov, Street University, 2a, 100095, Tashkent, Republic of UzbekistanAbdumalik GaibovTashkent State Technical University named after Islam Karimov, Street University, 2a, 100095, Tashkent, Republic of UzbekistanAbdigani EshkulovTashkent State Technical University named after Islam Karimov, Street University, 2a, 100095, Tashkent, Republic of UzbekistanMarguba MirkamilovaTashkent State Technical University named after Islam Karimov, Street University, 2a, 100095, Tashkent, Republic of UzbekistanDilfuza ShukurovaTashkent State Technical University named after Islam Karimov, Street University, 2a, 100095, Tashkent, Republic of Uzbekistan
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