Works citing this work

2 works

Work: Ion-based growth of special films: Techniques and mechanisms

1. Transition layer formation simulation during film deposition by an ion-molecular beam

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2. Ion bombardment effect on Si homoepitaxial growth from ion molecular beams

   T.S. Pugacheva, М. С. Саидов, A. S. Lutovich

   ArticleIon-surface interactions and analysisRadiation Effects19871 citations

   ABIABI:AkademIndex/openalex/1987.article.000061