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Works citing this work
1 works
Modified method of plasma-enhanced chemical vapor deposition of nanocrystalline silicon
V. G. Golubev
,
А. В. Медведев
,
А. Б. Певцов
+1
Article
Silicon Nanostructures and Photoluminescence
Technical Physics Letters
1998
0 citations
ABI
ABI:AkademIndex/openalex/1998.article.000174