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  1. Thermal sensor based on si single crystal implanted with different parties P<sup>+</sup> and B<sup>+</sup> ions

    I. R. Bekpulatov, Sh. K. Saliyeva, Z. R. Saidakhmedova +1

    ArticleSemiconductor materials and interfacesE3S Web of Conferences20230 citations
    ABI