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Works citing this work

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  1. Study of The Process of Formation of Heterostructural Nanofilms MexSiy/Si and GaxMe1-xAs/GaAs by Ion Implantation

    Eshboboyev Sardor Nurbobo Ugli, Tashatov Allanazar Karshievich

    ArticleIon-surface interactions and analysisJournal of Physical Science20250 citations
    ABI