Yu. A. Bumay

Работ: 1

1. Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon

   R. Job, W. R. Fahrner, A. Ulyashin +3

   СтатьяSilicon and Solar Cell TechnologiesDiffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena1997Цитирований: 0

   ABIABI:AkademIndex/openalex/1997.article.000145