S. P. Roshchupkin

Работ: 1

National Academy of Sciences of Ukraine, Applied Physics Institute, Sumy, Ukraine

1. Influence of relativistic and quantum effects on the blur in projection lithography systems

   S. P. Roshchupkin, V.E. Storizhko, О.И. Денисенко +4

   СтатьяLaser-Matter Interactions and Applications2004Цитирований: 0

   ABIABI:AkademIndex/openalex/2004.article.000303