B. Sulkio‐Cleff

Работ: 1

University of Muenster, Institute of Nuclear Physics, Muenster

1. Influence of relativistic and quantum effects on the blur in projection lithography systems

   S. P. Roshchupkin, V.E. Storizhko, О.И. Денисенко +4

   СтатьяLaser-Matter Interactions and Applications2004Цитирований: 0

   ABIABI:AkademIndex/openalex/2004.article.000303