Eddy current method for studying the electrical conductivity of semiconductor and thin-film materials

The article describes the use of the eddy current method for studying electrical conductivity and assessing the quality of semiconductors and thin-film materials. The eddy current non-destructive testing method is based on recording changes in the electromagnetic field in the material. In this case, it becomes possible to read the signal of the eddy current transducer and analyze the data on changes in the electromagnetic field. The design of a measuring system is described, which allows automatic scanning of the objects under study based on Cartesian kinematics. To automate the detection of defective areas of the objects under study, a neural ultra-precise network is deployed and trained. The design of an automatic eddy current system is considered, including a control unit, a generator, a positioning system, and an eddy current sensor. The article presents a description of the eddy current transducer used and the results of experiments confirming the possibility of using the eddy current method to study conductivity and assess semiconductor and thin-film materials.

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