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Light-induced metastable defects in hydrogenated amorphous silicon: A systematic study

M. StutzmannXerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304W. B. JacksonXerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304C. C. TsaiXerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304
1985en
ABI

Аннотация

We study the magnitude of metastable light-induced changes in undoped hydrogenated amorphous silicon (the Staebler-Wronski effect) with electron-spin-resonance and photoconductivity measurements. The influence of the following parameters is investigated in a systematic way: sample thickness, impurity content, illumination time, light intensity, photon energy, and illumination and annealing temperatures. The experimental results can be explained quantitatively by a model based on the nonradiative recombination of photoexcited carriers as the defect-creating step. In the framework of this model, the Staebler-Wronski effect is an intrinsic, self-limiting bulk process, characterized by a strongly sublinear dependence on the total light exposure of a sample. The experimental results suggest that the metastable changes are caused by recombination-induced breaking of weak Si--Si bonds, rather than by trapping of excess carriers in already existing defects. Hydrogen could be involved in the microscopic mechanism as a stabilizing element. The main metastable defect created by prolonged illumination is the silicon dangling bond. An analysis of the annealing behavior shows that a broad distribution of metastable dangling bonds exists, characterized by a variation of the energy barrier separating the metastable state from the stable ground state between 0.9 and 1.3 eV.

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