The microstructure and mechanical properties of (TiAlSiY)N nanostructured coatings

(TiAlSiY)N nanostructured coatings fabricated via the vacuum-arc evaporation method were investigated using a complex of complementary techniques. A bias potential was varied from −200 V (series 1) to −500 V (series 2) to analyze the influence of this parameter on the microstructure, phase composition and mechanical properties of nitride coatings. High potential (−500 V) led to selective sputtering of the target material, small size of crystallites of about 10 nm, and their preferred orientation with [110] axis. It caused a low hardness (H = 6.95 GPa) and a tendency to intense wear during scratch test and tribological tests. At a bias potential of about −200 V, crystallites of the stoichiometric composition with an average size of 140 nm and preferred orientation with [111] axis were formed. In this case, (TiAlSiY)N coatings showed superhard state (H = 49.5 GPa), and were characterized by high resistance to abrasion and low wear during tribological tests.

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