Comparative study of kinetic energy spectra and mass distributions of Ta+ ions sputtered from tantalum by atomic and molecular ion bombardment
S.F. BelykhArifov Institute of Electronics, Academy of Sciences of Uzbekistan, 700143 Tashkent, UzbekistanУ. Х. РасулевArifov Institute of Electronics, Academy of Sciences of Uzbekistan, 700143 Tashkent, UzbekistanA.V. SamartsevArifov Institute of Electronics, Academy of Sciences of Uzbekistan, 700143 Tashkent, UzbekistanI. V. VeryovkinArifov Institute of Electronics, Academy of Sciences of Uzbekistan, 700143 Tashkent, Uzbekistan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal1998en
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